Change Language :

igus® energy supply systems in the Brooks cleanroom

Cost-reducing, technology improving components for every cleanroom


Profile:

  • Industry: cleanroom / semiconductor
  • Application: 300mm wafer processing equipment in semiconductor manufacturing.
  • Product: zipper e-chain®
  • Requirements: Clean air in the production of its fixload, a load port used in semiconductor manufacturing.
Learn more about cleanrooms
Brooks Cleanroom Fixload

Problem

Brooks is a company that needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300mm wafer processing equipment in the semiconductor manufacturing.

During loading, the wafers are exposed to the environment, making the cleanroom's energy supply system especially critical.

Solution

A Zipper e-chain® is used in a hanging installation position. A travel distance of 290mm for 50-60 cycles per hour is attained during the three-shift operation. Tests by Brooks have shown no wear out of the igus® energy supply system, even in the long-term tests.

The patented zipper system enables additional protection and the ability to quickly assemble the cable carrier. This increases the operating safety and the holding times.

To the Zipper e-chain® product page

Other cleanroom application examples

e-skin flat in use in a linear system with air bearings

Industry: Chip production/Semiconductor

e-skin flat in use in a linear system with air bearings

Result: At as a 4-fold layer together with PVC & TPE cables from igus® ensures the reliable energy supply of an air bearing linear system.

  • Learn more
    • Cleanroom application example semiconductors

    Industry: Semiconductor manufacturing

    e-chain® systems in semiconductor manufacturing

    Result: The patented ​zipper e-chain®​ system meets the required travel distance of about 290mm. Cycle numbers of 50-60 cycles per hour are achieved, usually in three-shift operation.

  • Learn more
    • Cleanroom application example semiconductors

    Industry: Chip production/Semiconductor

    Wafer handling

    Result: The e-chain® E6 can supply energy for wafer handling in chip production where acceleration rates can reach up to 4 m/s² and speeds up to 6 m/s without issues.

  • Learn more
    • Use in a laboratory unit for liquid handling.

    Industry: Medical technology

    drylin® TR high helix thread nuts for laboratory equipment

    Result: drylin® TR high helix thread nuts were used in laboratory equipment for handling fluids. The advantages for the cleanroom are their low coefficient of friction, higher efficiency and no lubrication is necessary preventing contamination.

  • Learn more

    • Assistance pour les demandes

    Pour toute question supplémentaire ou information sur les produits, veuillez contacter :

    Dan Thompson
    Dan Thompson

    Senior Product Manager

    +1 800 521 2747Courriel 

    Service clientèle:
    Téléphone : du lundi au vendredi, de 8 h à 17 h.
    LiveChat : 24 heures sur 24.

    Prendre rendez-vous
    Prendre rendez-vous avec un expert produit.