Person in a cleanroom

Abrasion Resistant Parts for the Cleanroom Industry

Components suitable for contact-free environments up to ISO Class 1

  • Easy assembly and fast delivery
  • Save installation space and weight
  • Low noise & vibration
  • Easy-to-open e-chains® for quick cable replacement
  • Also available as a complete system from a single source


Browse the Engineer's Toolbox

Browse Cleanroom Industries

Semiconductor industry

semiconductor industry

Display industry

Display industry

Microelectronics industry

microelectronics industry

Battery industry

Cable carriers for cleanrooms

Cleanroom energy chain C6

C6 series e-chain®

e-skin

e-skin®

e-skin flat

e-skin flat®

e-skin® flat with support chain

e-skin® flat SKF.S

Browse Cleanroom-Approved Products

chainflex cable and hoses for cleanroom with 4 year guarantee

chainflex® cable & hoses

drylin linear guides for cleanroom

drylin® linear guides

iglide slewing rings for cleanroom

iglide® slewing rings

Customer Applications

e-skin® flat in use in a linear system with air bearings

e-skin flat in use in a linear system with air bearings

e-chain® systems in semiconductor manufacturing

Cleanroom application example semiconductors

Wafer handling

Cleanroom application example semiconductors

drylin® TR high helix thread nuts for laboratory equipment

Use in a laboratory unit for liquid handling.

Products by cleanroom class

ISO 14644-1FED STD 209EGMP (non-operational)Max. particles (0.5 micron) m³Max. particles (0.5 micron) f³igus products that meet the standard
1N/AN/AEnergy chains, cables, corrugated tubes, pneumatic hoses
2N/AN/Asee above
3135see above + linear guides
410352see above
5100A & B3.520100see above
61.00035.200997see above
710.000C352.0009.967see above
8100.000D3.520.00099.675see above
9N/A35.200.00996.747see above

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