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igus® energy supply systems in the Brooks cleanroom

Cost-reducing, technology improving components for every cleanroom


Profile:

  • Industry: cleanroom / semiconductor
  • Application: 300mm wafer processing equipment in semiconductor manufacturing.
  • Product: zipper e-chain®
  • Requirements: Clean air in the production of its fixload, a load port used in semiconductor manufacturing.
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Brooks Cleanroom Fixload

Problem

Brooks is a company that needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300mm wafer processing equipment in the semiconductor manufacturing.

During loading, the wafers are exposed to the environment, making the cleanroom's energy supply system especially critical.

Solution

A Zipper e-chain® is used in a hanging installation position. A travel distance of 290mm for 50-60 cycles per hour is attained during the three-shift operation. Tests by Brooks have shown no wear out of the igus® energy supply system, even in the long-term tests.

The patented zipper system enables additional protection and the ability to quickly assemble the cable carrier. This increases the operating safety and the holding times.

To the Zipper e-chain® product page

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