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igus® energy supply systems in the cleanroom of the company Brooks

Components for every cleanroom that improve technology and reduce costs


Profile:

  • Industry: cleanroom / semiconductor
  • Application: 300 mm wafer processing equipment in the semiconductor manufacturing.
  • Product: zipper e-chian®
  • Requirements: Clean air in the production of its Fixload.
Go to Cleanroom Overview
Brooks-Fixload

Problem

The company Brooks needs especially clean air in the production of its Fixload. This is due to the very sensitive application area of the load interface for 300 mm wafer processing equipment in the semiconductor manufacturing.

As the wafers to be processed are exposed to the environment while loading, the clean room capability of the used energy supply system is, among others, very important here.

Solution

Tests by Brooks have shown that wearout of the igus® energy supply system was not determined even in the long-term test. A Zipper e-chain® is used in hanging installation position. At a travel distance of 290 mm, a number of 50-60 cycles per hour is attained mostly in the three-shift operation.

Other advantage:
The patented zipper system enables a filling with energy cables at lightning speed and additional protection. This increases the operating safety and the holding times.
To the Zipper e-chain® product page

Selected products for the cleanroom industry

e-skin flat

Flat cable guidance system

  • Suitable for cleanroom IPA ISO Class 1
  • Modular and compact design
  • Cables can be replaced in minutes
  • Optionally with co-ordinated CFCLEAN stranded structure for high dependability
e-skin flat
e-skin® soft

Two-piece corrugated tubes

  • Suitable for cleanroom according to IPA ISO Class 1
  • Two-piece, consisting of upper and lower shells
  • Fast assembly due to "zipper" opening function
  • For fast, short, unsupported applications
e-skin corrugated tubes
e-chain E6

e-chain for high dynamics

  • Cleanroom IPA ISO Class 1
  • Very quiet: 32dB(A) at 1m/s
  • Crossbars openable from both sides
  • Smooth, cable-friendly interior
  • Release pretension by turning the inner link
e-chain E6.1

Application examples for the cleanroom




The terms "igus", "Apiro", "chainflex", "CFRIP", "conprotect", "CTD", "drylin", "dry-tech", "dryspin", "easy chain", "e-chain", "e-chain systems", "e-ketten", "e-kettensysteme", "e-skin", "e-spool", "flizz", "ibow", "igear", "iglidur", "igubal", "kineKIT", "manus", "motion plastics", "pikchain", "plastics for longer life", "readychain", "readycable", "ReBeL", "speedigus", "triflex", "robolink", "xirodur", and "xiros" are legally protected trademarks of the igus® GmbH/ Cologne in the Federal Republic of Germany and where applicable in some foreign countries.

igus® GmbH points out that it does not sell any products of the companies Allen Bradley, B&R, Baumüller, Beckhoff, Lahr, Control Techniques, Danaher Motion, ELAU, FAGOR, FANUC, Festo, Heidenhain, Jetter, Lenze, LinMot, LTi DRiVES, Mitsibushi, NUM,Parker, Bosch Rexroth, SEW, Siemens, Stöber and all other drive manufacturers mention in this website. The products offered by igus® are those of igus® GmbH